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Modeling of bombardment induced oxidation of silicon

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.date.accessioned2021-10-14T16:48:11Z
dc.date.available2021-10-14T16:48:11Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5219
dc.sourceIIOimport
dc.titleModeling of bombardment induced oxidation of silicon
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage3001
dc.source.endpage3011
dc.source.journalJournal of Applied Physics
dc.source.issue5
dc.source.volume89
imec.availabilityPublished - imec


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