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Fundamental study of ion-substrate interactions with low energy reactive ions

dc.contributor.authorDe Witte, Hilde
dc.date.accessioned2021-10-14T16:48:15Z
dc.date.available2021-10-14T16:48:15Z
dc.date.issued2001-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5220
dc.sourceIIOimport
dc.titleFundamental study of ion-substrate interactions with low energy reactive ions
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis advisors : Prof. Dr. Gijbels and Prof. Dr. Ir. W. Vandervorst


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