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The investigation of microsystems using Raman spectroscopy

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorJian, C.
dc.contributor.authorvan Spengen, Merlijn
dc.date.accessioned2021-10-14T16:48:26Z
dc.date.available2021-10-14T16:48:26Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5222
dc.sourceIIOimport
dc.titleThe investigation of microsystems using Raman spectroscopy
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage213
dc.source.endpage223
dc.source.journalOptics and Lasers in Engineering
dc.source.volume36
imec.availabilityPublished - imec


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