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Spectroscopic photon emission microscopy: a unique tool for failure analysis of microelectronics devices

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRasras, Mahmoud
dc.date.accessioned2021-10-14T16:48:31Z
dc.date.available2021-10-14T16:48:31Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5223
dc.sourceIIOimport
dc.titleSpectroscopic photon emission microscopy: a unique tool for failure analysis of microelectronics devices
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpage1161
dc.source.endpage1169
dc.source.journalMicroelectronics Reliability
dc.source.issue8
dc.source.volume41
imec.availabilityPublished - imec


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