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CoSi2 formation through SiO 2

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T16:50:59Z
dc.date.available2021-10-14T16:50:59Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5248
dc.sourceIIOimport
dc.titleCoSi2 formation through SiO 2
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage19
dc.source.endpage26
dc.source.journalThin Solid Films
dc.source.issue1
dc.source.volume386
imec.availabilityPublished - imec


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