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CoSi2 nucleation in the presence of Ge

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, T. R. L.
dc.contributor.authorCardon, F.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T16:51:23Z
dc.date.available2021-10-14T16:51:23Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5252
dc.sourceIIOimport
dc.titleCoSi2 nucleation in the presence of Ge
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage243
dc.source.endpage250
dc.source.journalThin Solid Films
dc.source.issue2
dc.source.volume384
imec.availabilityPublished - imec


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