Show simple item record

Carbon enhancement of SiO2 nucleation in buried oxide synthesis

dc.contributor.authorEfremov, A. A.
dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorRomanova, G. P.
dc.contributor.authorSarikov, A. V.
dc.contributor.authorClaeys, C.
dc.date.accessioned2021-10-14T16:54:19Z
dc.date.available2021-10-14T16:54:19Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5278
dc.sourceIIOimport
dc.titleCarbon enhancement of SiO2 nucleation in buried oxide synthesis
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpageF92
dc.source.endpageF97
dc.source.journalJournal of the Electrochemical Society
dc.source.issue5
dc.source.volume148
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record