dc.contributor.author | Hantschel, Thomas | |
dc.contributor.author | Slesazeck, Stefan | |
dc.contributor.author | Niedermann, P. | |
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-14T17:00:36Z | |
dc.date.available | 2021-10-14T17:00:36Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5332 | |
dc.source | IIOimport | |
dc.title | Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes | |
dc.type | Journal article | |
dc.contributor.imecauthor | Hantschel, Thomas | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Hantschel, Thomas::0000-0001-9476-4084 | |
dc.source.peerreview | no | |
dc.source.beginpage | 749 | |
dc.source.endpage | 754 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 1_4 | |
dc.source.volume | 57-58 | |
imec.availability | Published - imec | |