Show simple item record

Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSlesazeck, Stefan
dc.contributor.authorNiedermann, P.
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-14T17:00:36Z
dc.date.available2021-10-14T17:00:36Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5332
dc.sourceIIOimport
dc.titleIntegrating diamond pyramids into metal cantilevers and using them as electrical AFM probes
dc.typeJournal article
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.beginpage749
dc.source.endpage754
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume57-58
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record