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Dielectric pockets - a new concept of the junctions for deca- nanometric CMOS devices

dc.contributor.authorJurczak, Gosia
dc.contributor.authorSkotnicki, T.
dc.contributor.authorGwoziecki, R.
dc.contributor.authorPaoli, M.
dc.contributor.authorTormen, B.
dc.contributor.authorRibot, P.
dc.contributor.authorDutartre, D.
dc.contributor.authorMonfray, S.
dc.contributor.authorGalvier, J.
dc.date.accessioned2021-10-14T17:07:36Z
dc.date.available2021-10-14T17:07:36Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5385
dc.sourceIIOimport
dc.titleDielectric pockets - a new concept of the junctions for deca- nanometric CMOS devices
dc.typeJournal article
dc.contributor.imecauthorJurczak, Gosia
dc.source.peerreviewno
dc.source.beginpage1770
dc.source.endpage1775
dc.source.journalIEEE Trans. Electron Devices
dc.source.issue8
dc.source.volume48
imec.availabilityPublished - imec


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