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Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation

dc.contributor.authorKondoh, Eiichi
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorLin, E.
dc.contributor.authorGidley, D.
dc.contributor.authorNakashima, A.
dc.date.accessioned2021-10-14T17:10:22Z
dc.date.available2021-10-14T17:10:22Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5406
dc.sourceIIOimport
dc.titleComparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpageL323
dc.source.endpageL326
dc.source.journalJapanese Journal of Applied Physics Part 2-Letters
dc.source.issue4A
dc.source.volume40
imec.availabilityPublished - imec


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