Stoichiometry changes during low energy oxygen bombardment
dc.contributor.author | Brijs, Bert | |
dc.contributor.author | De Coster, Walter | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Storm, Wolfgang | |
dc.contributor.author | Osiceanu, Petre | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-09-29T13:04:23Z | |
dc.date.available | 2021-09-29T13:04:23Z | |
dc.date.issued | 1995 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/542 | |
dc.source | IIOimport | |
dc.title | Stoichiometry changes during low energy oxygen bombardment | |
dc.type | Journal article | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 614 | |
dc.source.endpage | 18 | |
dc.source.journal | Nuclear Instruments and Methods in Physics Research B | |
dc.source.issue | 1_4 | |
dc.source.volume | 99 | |
imec.availability | Published - open access |