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Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies

dc.contributor.authorLauwers, A.
dc.contributor.authorSteegen, An
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLindsay, Richard
dc.contributor.authorSatta, Alessandra
dc.contributor.authorBender, Hugo
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T17:14:51Z
dc.date.available2021-10-14T17:14:51Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5439
dc.sourceIIOimport
dc.titleMaterials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies
dc.typeJournal article
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage2026
dc.source.endpage2037
dc.source.journalJournal of Vacuum Science & Technology B
dc.source.issue6
dc.source.volume19
imec.availabilityPublished - imec


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