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Gaseous impurities in Co silicidation - impact and solutions

dc.contributor.authorLi, Hua
dc.contributor.authorVereecke, Guy
dc.contributor.authorMaex, Karen
dc.contributor.authorFroyen, L.
dc.date.accessioned2021-10-14T17:15:30Z
dc.date.available2021-10-14T17:15:30Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5443
dc.sourceIIOimport
dc.titleGaseous impurities in Co silicidation - impact and solutions
dc.typeJournal article
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.source.peerreviewno
dc.source.beginpageG344
dc.source.endpageG354
dc.source.journalJournal of the Electrochemical Society
dc.source.issue6
dc.source.volume148
imec.availabilityPublished - imec


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