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Mechanical stress of the electrical performance of polycrystalline-silicon resistors

dc.contributor.authorNakabayashi, N.
dc.contributor.authorOhyama, Hidenori
dc.contributor.authorSimoen, Eddy
dc.contributor.authorIkegami, M.
dc.contributor.authorClaeys, Cor
dc.contributor.authorKobayashi, K.
dc.contributor.authorYoneoka, M.
dc.contributor.authorMiyahara, K.
dc.date.accessioned2021-10-14T17:25:20Z
dc.date.available2021-10-14T17:25:20Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5509
dc.sourceIIOimport
dc.titleMechanical stress of the electrical performance of polycrystalline-silicon resistors
dc.typeJournal article
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage2579
dc.source.endpage2582
dc.source.journalJournal of Materials Research
dc.source.issue9
dc.source.volume16
imec.availabilityPublished - imec


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