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An infrared pneumatic detector made by micromachining technology

dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorSlater, Tim
dc.date.accessioned2021-09-29T13:04:29Z
dc.date.available2021-09-29T13:04:29Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/551
dc.sourceIIOimport
dc.titleAn infrared pneumatic detector made by micromachining technology
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage193
dc.source.endpage195
dc.source.journalJ. Micromechanics and Microengineering
dc.source.issue2
dc.source.volume5
imec.availabilityPublished - open access


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