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Micromachined infrared pneumatic detector for gas sensor

dc.contributor.authorChévrier, Jean-Baptiste
dc.contributor.authorBaert, Kris
dc.contributor.authorSlater, Tim
dc.contributor.authorVerbist, Agnes
dc.date.accessioned2021-09-29T13:04:30Z
dc.date.available2021-09-29T13:04:30Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/552
dc.sourceIIOimport
dc.titleMicromachined infrared pneumatic detector for gas sensor
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage71
dc.source.endpage74
dc.source.journalMicrosystem Technologies
dc.source.volume1
imec.availabilityPublished - open access


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