Modeling of complete suppression of boron out-diffusion in Si1-xGex by carbon incorporation
| dc.contributor.author | Krishnasamy, Rajendran | |
| dc.contributor.author | Schoenmaker, Wim | |
| dc.date.accessioned | 2021-10-14T17:39:43Z | |
| dc.date.available | 2021-10-14T17:39:43Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5598 | |
| dc.source | IIOimport | |
| dc.title | Modeling of complete suppression of boron out-diffusion in Si1-xGex by carbon incorporation | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 229 | |
| dc.source.endpage | 233 | |
| dc.source.journal | Solid-State Electronics | |
| dc.source.volume | 45 | |
| imec.availability | Published - imec |
Files in this item
| Files | Size | Format | View |
|---|---|---|---|
|
There are no files associated with this item. |
|||