Exploring capabilities of electrical linewidth measurement (ELM) techniques
dc.contributor.author | Rangelov, Ventzeslav | |
dc.contributor.author | Sarstedt, Margit | |
dc.contributor.author | Somerville, John | |
dc.contributor.author | Marschner, Thomas | |
dc.contributor.author | Jonckheere, Rik | |
dc.contributor.author | Poelaert, Abel | |
dc.date.accessioned | 2021-10-14T17:40:52Z | |
dc.date.available | 2021-10-14T17:40:52Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5605 | |
dc.source | IIOimport | |
dc.title | Exploring capabilities of electrical linewidth measurement (ELM) techniques | |
dc.type | Journal article | |
dc.contributor.imecauthor | Jonckheere, Rik | |
dc.contributor.orcidimec | Jonckheere, Rik::0000-0003-2211-9443 | |
dc.source.peerreview | no | |
dc.source.beginpage | 673 | |
dc.source.endpage | 681 | |
dc.source.journal | Microelectronic Engineering | |
dc.source.issue | 1_4 | |
dc.source.volume | 57-58 | |
imec.availability | Published - imec |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |