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Exploring capabilities of electrical linewidth measurement (ELM) techniques

dc.contributor.authorRangelov, Ventzeslav
dc.contributor.authorSarstedt, Margit
dc.contributor.authorSomerville, John
dc.contributor.authorMarschner, Thomas
dc.contributor.authorJonckheere, Rik
dc.contributor.authorPoelaert, Abel
dc.date.accessioned2021-10-14T17:40:52Z
dc.date.available2021-10-14T17:40:52Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5605
dc.sourceIIOimport
dc.titleExploring capabilities of electrical linewidth measurement (ELM) techniques
dc.typeJournal article
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.source.peerreviewno
dc.source.beginpage673
dc.source.endpage681
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume57-58
imec.availabilityPublished - imec


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