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Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures

dc.contributor.authorStuer, Cindy
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T17:55:36Z
dc.date.available2021-10-14T17:55:36Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5688
dc.sourceIIOimport
dc.titleInvestigation by convergent beam electron diffraction of the stress around shallow trench isolation structures
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.beginpageG597
dc.source.endpageG601
dc.source.journalJournal of the Electrochemical Society
dc.source.issue11
dc.source.volume148
imec.availabilityPublished - imec


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