Show simple item record

Characterisation of the local mechanical stress in sub-0.25 μm microelectronic technologies

dc.contributor.authorStuer, Cindy
dc.date.accessioned2021-10-14T17:55:56Z
dc.date.available2021-10-14T17:55:56Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5690
dc.sourceIIOimport
dc.titleCharacterisation of the local mechanical stress in sub-0.25 μm microelectronic technologies
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisors : Prof. Dr. J. Van Landuyt and Dr. H. Bender


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record