dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Röhr, Erika | |
dc.contributor.author | Carter, Richard | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | De Witte, Hilde | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-14T18:18:04Z | |
dc.date.available | 2021-10-14T18:18:04Z | |
dc.date.issued | 2001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5806 | |
dc.source | IIOimport | |
dc.title | Investigation of fluorine in dry ultrathin silicon oxides | |
dc.type | Journal article | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.orcidimec | Vereecke, Guy::0000-0001-9058-9338 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.source.peerreview | no | |
dc.source.beginpage | 2108 | |
dc.source.endpage | 2113 | |
dc.source.journal | Journal of Vacuum Science & Technology B | |
dc.source.issue | 6 | |
dc.source.volume | 19 | |
imec.availability | Published - imec | |