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Ion Beam Induced Modification of Si-Based Material during Sputter Profiling

dc.contributor.authorDe Coster, Walter
dc.date.accessioned2021-09-29T13:04:56Z
dc.date.available2021-09-29T13:04:56Z
dc.date.issued1995-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/584
dc.sourceIIOimport
dc.titleIon Beam Induced Modification of Si-Based Material during Sputter Profiling
dc.typePHD thesis
dc.source.peerreviewno
imec.availabilityPublished - imec
imec.internalnotesThesis Advisors : Prof. Dr. Ir. W. Vandervorst and Prof. Dr. Ir. H. Maes


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