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New closed-form formula for frequency-dependent resistance and inductance of IC interconnects on silicon substrate

dc.contributor.authorYmeri, Hasan
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T18:28:21Z
dc.date.available2021-10-14T18:28:21Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5856
dc.sourceIIOimport
dc.titleNew closed-form formula for frequency-dependent resistance and inductance of IC interconnects on silicon substrate
dc.typeJournal article
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage283
dc.source.endpage286
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue3
dc.source.volume11
imec.availabilityPublished - imec


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