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Frequency-dependent line capacitance and conductance calculations of on-chip interconnects on silicon substrate using Fourier cosine series approach

dc.contributor.authorYmeri, Hasan
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorVandenberghe, S.
dc.contributor.authorMaex, Karen
dc.contributor.authorDe Roest, David
dc.contributor.authorStucchi, Michele
dc.date.accessioned2021-10-14T18:30:14Z
dc.date.available2021-10-14T18:30:14Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5865
dc.sourceIIOimport
dc.titleFrequency-dependent line capacitance and conductance calculations of on-chip interconnects on silicon substrate using Fourier cosine series approach
dc.typeJournal article
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorDe Roest, David
dc.contributor.imecauthorStucchi, Michele
dc.source.peerreviewno
dc.source.beginpage209
dc.source.endpage215
dc.source.journalJournal of Semiconductor Technology and Science
dc.source.issue4
dc.source.volume1
imec.availabilityPublished - imec


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