Polysilicon substrates
| dc.contributor.author | Ghannam, Moustafa | |
| dc.contributor.author | Nijs, Johan | |
| dc.date.accessioned | 2021-10-14T18:38:07Z | |
| dc.date.available | 2021-10-14T18:38:07Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5903 | |
| dc.source | IIOimport | |
| dc.title | Polysilicon substrates | |
| dc.type | Book chapter | |
| dc.contributor.imecauthor | Ghannam, Moustafa | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 7728 | |
| dc.source.book | Encyclopedia of Materials: Science and Technology | |
| dc.source.endpage | 7735 | |
| imec.availability | Published - imec |
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