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Polycrystalline silicon in ULSI

dc.contributor.authorGhannam, Moustafa
dc.contributor.authorMertens, Robert
dc.date.accessioned2021-10-14T18:38:18Z
dc.date.available2021-10-14T18:38:18Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5904
dc.sourceIIOimport
dc.titlePolycrystalline silicon in ULSI
dc.typeBook chapter
dc.contributor.imecauthorGhannam, Moustafa
dc.contributor.imecauthorMertens, Robert
dc.source.peerreviewno
dc.source.beginpage7152
dc.source.bookEncyclopedia of Materials: Science and Technology
dc.source.endpage7158
imec.availabilityPublished - imec


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