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Barriers for Cu/low k damascene structures

dc.contributor.authorMaex, Karen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorSatta, Alessandra
dc.contributor.authorLanckmans, Filip
dc.contributor.authorWu, Wen
dc.contributor.authorIacopi, Francesca
dc.date.accessioned2021-10-14T18:42:55Z
dc.date.available2021-10-14T18:42:55Z
dc.date.issued2001
dc.identifier.issn1355-8633
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5926
dc.sourceIIOimport
dc.titleBarriers for Cu/low k damascene structures
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorTokei, Zsolt
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage189
dc.source.endpage191
dc.source.journalSemiconductor Fabtech
dc.source.issue14
imec.availabilityPublished - open access


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