dc.contributor.author | Aresu, S. | |
dc.contributor.author | De Ceuninck, Ward | |
dc.contributor.author | Dreesen, R. | |
dc.contributor.author | Kroes, K. | |
dc.contributor.author | Andries, E. | |
dc.contributor.author | Manca, Jean | |
dc.contributor.author | De Schepper, Luc | |
dc.contributor.author | Degraeve, Robin | |
dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | D'Olieslaeger, Marc | |
dc.contributor.author | D'Haen, Jan | |
dc.date.accessioned | 2021-10-14T21:07:16Z | |
dc.date.available | 2021-10-14T21:07:16Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5958 | |
dc.source | IIOimport | |
dc.title | High-resolution SILC measurements of thin SiO2 at ultra low voltages | |
dc.type | Journal article | |
dc.contributor.imecauthor | De Ceuninck, Ward | |
dc.contributor.imecauthor | Degraeve, Robin | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | D'Olieslaeger, Marc | |
dc.contributor.imecauthor | D'Haen, Jan | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 1485 | |
dc.source.endpage | 1489 | |
dc.source.journal | Microelectronics Reliability | |
dc.source.issue | 9_11 | |
dc.source.volume | 42 | |
imec.availability | Published - open access | |
imec.internalnotes | 13th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF; October 2002; Rimini, Italy | |