Browsing Presentations by author "Jacobs, B."
Now showing items 1-3 of 3
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Chemical role of SF6 in a SiCl4-based reactive ion etching of GaN
Karouta, F.; Jacobs, B.; Kramer, M. C. J. C. M.; Jacobs, Koen; Moerman, Ingrid (1999) -
Ideal chemistry for reactive ion etching of GaN
Karouta, F.; Jacobs, B.; Jacobs, Koen; Moerman, Ingrid (1999) -
Ideal chemistry for reactive ion etching of GaN
Karouta, F.; Jacobs, B.; Jacobs, Koen; Moerman, Ingrid (1999)