Browsing Presentations by imec author "4397ec0c83672cb92105836da0d113f6461e68ec"
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Carbon nanotube interconnects: electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Yusaku, Kashiwagi; Teugels, Lieve; Caluwaerts, Rudy; Beyer, Gerald; Heyns, Marc; Tokei, Zsolt; De Gendt, Stefan (2011) -
Catalyzed CVD growth of carbon nanotubes
van der Veen, Marleen; Cirillo, Marco; Chiodarelli, Nicolo; De Henau, Katia; Riskin, Alexander; Van Bael, Marlies; Hens, Zeger; De Gendt, Stefan; Vereecken, Philippe (2009) -
Defect characterization in templated DSA through electrical measurements
Rincon Delgadillo, Paulina; Chan, BT; Gronheid, Roel; van der Veen, Marleen; Heylen, Nancy; Vandersmissen, Kevin; Demuynck, Steven; Boemmels, Juergen (2016) -
Graphene for microelectronics
van der Veen, Marleen; Soree, Bart; Cantoro, Mirco; Klekachev, Alexander; Nourbakhsh, Amirhasan; Clemente, Francesca; Szepieniec, Mark; Vereecken, Philippe; Stesmans, Andre; Sels, Bert; De Gendt, Stefan; Heyns, Marc (2009) -
Low temperature CNT growth for BEOL interconnects
Cott, Daire; Masahito, Sugiura; Vanpaemel, Johannes; van der Veen, Marleen; Tokei, Zsolt; Vereecken, Philippe (2013) -
Towards electrical verification of contact holes obtained with DSA of BCP
Rincon Delgadillo, Paulina; Bekaert, Joost; Vandenbroeck, Nadia; Gronheid, Roel; Chan, BT; van der Veen, Marleen; Vandersmissen, Kevin; Boemmels, Juergen; Luong, Vinh (2015)