Now showing items 1-1 of 1

    • Pore sealing of porous low-k films by SAMs for ALD 

      Armini, Silvia; Verdonck, Patrick; Loyo Prado, Jana; Krishtab, Mikhail; Swerts, Johan; Ciofi, Ivan; Meerschaut, Johan; Kim, Tae-Gon; Adelmann, Christoph; Le Quoc, Toan; Van Elshocht, Sven; Delabie, Annelies; Leunissen, Peter; Baklanov, Mikhaïl (2011)