Browsing Presentations by author "Padhi, Deenesh"
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Spacer defined double patterning for 20nm half pitch interconnect damascene structures
Siew, Yong Kong; Cockburn, Andrew; Beyer, Gerald; Versluijs, Janko; Kunnen, Eddy; Dekkers, Harold; Volders, Henny; Ciofi, Ivan; Gravey, Virginie; Noori, Atif; Padhi, Deenesh; Shah, Kavita (2010)