Browsing Presentations by author "Zekry, Joseph"
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Wafer scale fabrication of miniature vacuum packages for MEMS/NEMS using thin membranes of nanoporous alumina
Zekry, Joseph; Sabuncuoglu Tezcan, Deniz; Celis, Jean-Pierre; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2012)