Browsing Presentations by imec author "d99968b7d32a73e90b9cfd69895ddbb72595629b"
Now showing items 1-13 of 13
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A new method for the determination of surface chemistry of structured surfaces at the microscale using RBS in a tomographic mode
Claessens, Niels; Vandervorst, Wilfried; Meersschaut, Johan (2020) -
Advanced mass discrimination in recoil spectrometry
Laricchiuta, Grazia; Vandervorst, Wilfried; Meersschaut, Johan (2016) -
Alternative high-k dielectrics for semiconductor applications
Van Elshocht, Sven; Adelmann, Christoph; Clima, Sergiu; Pourtois, Geoffrey; Conard, Thierry; Delabie, Annelies; Franquet, Alexis; Lehnen, Peer; Meersschaut, Johan; Menou, Nicolas; Popovici, Mihaela Ioana; Richard, Olivier; Schram, Tom; Wang, Xin Peng; Hardy, An; Dewulf, Daan; van Bael, M.K.; Blomberg, T.; Pieereux, D.; Swerts, J.; Maes, J.W.; Wouters, Dirk; De Gendt, Stefan; Kittl, Jorge (2008) -
Atomic layer deposition of Ru thin films using the zero-valence precursor EBECH Ru
Adelmann, Christoph; Popovici, Mihaela Ioana; Groven, Benjamin; Moens, Kristof; Meersschaut, Johan; Franquet, Alexis; Swerts, Johan; Delabie, Annelies; Van Elshocht, Sven (2014) -
Calibration of PIXE yields using binary thin films on Si
Meersschaut, Johan; Carbonel, Jacob; Lenka, Hara; Zhao, Qiang; Vantomme, Andre; Vandervorst, Wilfried (2013) -
Growth of multilayer transition-metal dichalcogenide layers by high temperature sulfurization in H2S
Heyne, Markus; Nuytten, Thomas; Meersschaut, Johan; Chiappe, Daniele; Caymax, Matty; de Marneffe, Jean-Francois; Radu, Iuliana (2015) -
High-throughput ion beam analysis in an industrial environment
Meersschaut, Johan; Vandervorst, Wilfried (2016) -
In-depth characterization of WSe2 monolayers grown by GSMBE
Mortelmans, Wouter; El Kazzi, Salim; Nuytten, Thomas; Crahaij, Steven; Meersschaut, Johan; Vanhaeren, Danielle; Landeloos, Lien; Conard, Thierry; Hoflijk, Ilse; Bender, Hugo; Merckling, Clement; Heyns, Marc (2017) -
Interface formation in rare-earth oxide containing advanced gate stacks
Adelmann, Christoph; Ferain, Isabelle; Franquet, Alexis; Conard, Thierry; Witters, Thomas; Richard, Olivier; Bender, Hugo; Meersschaut, Johan; Kittl, Jorge; Van Elshocht, Sven (2008) -
Nucleation behaviour of PEALD WS2 on Al2O3 and SiO2
Groven, Benjamin; Nalin Mehta, Ankit; Meersschaut, Johan; Vanhaeren, Danielle; Bender, Hugo; Verdonck, Patrick; Van Elshocht, Sven; Radu, Iuliana; Caymax, Matty; Delabie, Annelies (2016) -
RBS applied to 3D nanostructures
Claessens, Niels; Couture, Pierre; England, Jonathan; Delabie, Annelies; Bogdanowicz, Janusz; Vantomme, Andre; Vandervorst, Wilfried; Meersschaut, Johan (2022-07-17) -
Research and development on ion beam analysis in an industrial environment at imec
Meersschaut, Johan (2016) -
Sulfurization of metallic and oxidized molybdenum thin films
Heyne, Markus; Chiappe, Daniele; Meersschaut, Johan; Nuytten, Thomas; Conard, Thierry; Bender, Hugo; Huyghebaert, Cedric; Radu, Iuliana; de Marneffe, Jean-Francois; Neyts, Erik C.; De Gendt, Stefan (2016)