Browsing Presentations by imec author "e632831b6ad7576998b3cf24720d40acca7a111e"
Now showing items 1-7 of 7
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CMP of Ge and InP for microelectronic applications
Ong, Patrick; Peddeti, Shivaji; Leunissen, Peter; Babu, S.V. (2011) -
CMP of novel materials for frontend-of-line and backend-of-line applications
Leunissen, Peter; Ong, Patrick; Teugels, Lieve (2011) -
CMP process steps for silicon-based photonics integration
Ong, Patrick; Verheyen, Peter; Lepage, Guy; Van Campenhout, Joris; Absil, Philippe (2014) -
Environmental and health risks due to CMP of III/V materials
Ong, Patrick (2011) -
Ge CMP process development
Ong, Patrick; Leunissen, Peter; Ansar, Sheik; Gillot, Christophe; Lan, Yongqing; Noller, Bastian; Li, Yuzhuo (2012) -
Ge, III/V Materials CMP
Ong, Patrick; Lan, Yongqing; Noller, Bastian; Gillot, Christophe; Usman Ibrahim, Ansar; Lauter, Michael; Golzarian, Reza; Li, Yuzhuo (2012) -
Overview of FRONT-END CMP processes for 28nm and beyond
Ong, Patrick; Devriendt, Katia (2012)