Browsing Presentations by imec author "fefb0f643f14e25d61ebce9dcf79a5dc5cd502cb"
Now showing items 1-2 of 2
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Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process
Armini, Silvia; Herregods, Sebastiaan; Tokei, Zsolt; Charley, Anne-Laure; Leray, Philippe; Lee, Wei Ti; Larson, Tom; Figueiro, Nivea; Koret, Roy; Wolfling, Shay (2018) -
Use of scatterometry for NXE:3100 scanner monitoring
Charley, Anne-Laure (2012)