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Lateral and vertical dopant profiling in semiconductors by atomic force microscopy using conducting tips

dc.contributor.authorDe Wolf, Peter
dc.contributor.authorSnauwaert, Johan
dc.contributor.authorHellemans, L.
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorD'Olieslaeger, Marc
dc.contributor.authorQuaeyhaegens, D.
dc.date.accessioned2021-09-29T13:05:19Z
dc.date.available2021-09-29T13:05:19Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/603
dc.sourceIIOimport
dc.titleLateral and vertical dopant profiling in semiconductors by atomic force microscopy using conducting tips
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorD'Olieslaeger, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1699
dc.source.endpage704
dc.source.journalJ. Vac. Sci. Technol. A
dc.source.issue3
dc.source.volume13
imec.availabilityPublished - open access


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