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Mapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films

dc.contributor.authorCannaerts, M.
dc.contributor.authorChamirian, Oxana
dc.contributor.authorMaex, Karen
dc.contributor.authorVan Haesendonck, Chris
dc.date.accessioned2021-10-14T21:12:18Z
dc.date.available2021-10-14T21:12:18Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6079
dc.sourceIIOimport
dc.titleMapping nanometre-scale temperature gradients in patterned cobalt-nickel silicide films
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage149
dc.source.endpage152
dc.source.journalNanotechnology
dc.source.issue2
dc.source.volume13
imec.availabilityPublished - imec


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