The integration of high-k dielectrics: A story of modest achievements
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Van Bavel, Mieke | |
dc.date.accessioned | 2021-10-14T21:13:01Z | |
dc.date.available | 2021-10-14T21:13:01Z | |
dc.date.issued | 2002-09 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6089 | |
dc.source | IIOimport | |
dc.title | The integration of high-k dielectrics: A story of modest achievements | |
dc.type | Journal article | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Van Bavel, Mieke | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 103 | |
dc.source.endpage | 105 | |
dc.source.journal | Semiconductor Fabtech | |
dc.source.issue | 17 | |
imec.availability | Published - open access |