Show simple item record

Study of CoSi2 formation from a Co-Ni alloy

dc.contributor.authorChamirian, Oxana
dc.contributor.authorSteegen, An
dc.contributor.authorBender, Hugo
dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMarabelli, F.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:13:10Z
dc.date.available2021-10-14T21:13:10Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6091
dc.sourceIIOimport
dc.titleStudy of CoSi2 formation from a Co-Ni alloy
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage221
dc.source.endpage230
dc.source.journalMicroelectronic Engineering
dc.source.issue1_2
dc.source.volume60
imec.availabilityPublished - imec
imec.internalnotes5th Workshop on Materials for Advanced Metallization. March 2001; Sigtuna, Sweden


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record