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An integrated gas sensor technology using surface micro- machining

dc.contributor.authorChan, P. C. H.
dc.contributor.authorYan, G. Z.
dc.contributor.authorSheng, L. Y.
dc.contributor.authorSharma, R. K.
dc.contributor.authorTang, Z.
dc.contributor.authorSin, J.K.O.
dc.contributor.authorHsing, I. M.
dc.contributor.authorWang, Y.
dc.date.accessioned2021-10-14T21:13:17Z
dc.date.available2021-10-14T21:13:17Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6093
dc.sourceIIOimport
dc.titleAn integrated gas sensor technology using surface micro- machining
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage277
dc.source.endpage283
dc.source.journalSensors and Actuators B
dc.source.issue2_3
dc.source.volume82
imec.availabilityPublished - imec


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