Show simple item record

Characterisation and integration feasibility of JSR's low-k dielectric LKD-5109

dc.contributor.authorDas, Arabinda
dc.contributor.authorKokubo, Terukazu
dc.contributor.authorFurukawa, Yukiko
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVos, Ingrid
dc.contributor.authorSijmus, Bram
dc.contributor.authorIacopi, Francesca
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorCarbonell, Laure
dc.contributor.authorBrongersma, Sywert
dc.contributor.authorMaenhoudt, Mireille
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVervoort, Iwan
dc.contributor.authorSleeckx, Erik
dc.contributor.authorStucchi, Michele
dc.contributor.authorSchaekers, Marc
dc.contributor.authorBoullart, Werner
dc.contributor.authorRosseel, Erik
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorVanhaelemeersch, Serge
dc.contributor.authorShiota, A.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:19:41Z
dc.date.available2021-10-14T21:19:41Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6170
dc.sourceIIOimport
dc.titleCharacterisation and integration feasibility of JSR's low-k dielectric LKD-5109
dc.typeJournal article
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVos, Ingrid
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorSleeckx, Erik
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorVanhaelemeersch, Serge
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.contributor.orcidimecSleeckx, Erik::0000-0003-2560-6132
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecVanhaelemeersch, Serge::0000-0003-2102-7395
dc.source.peerreviewno
dc.source.beginpage25
dc.source.endpage33
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume64
imec.availabilityPublished - imec
imec.internalnotesMAM2002; Vaals, The Netherlands, 3-6 March 2002


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record