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The increasing importance of the use of ozone in the microelectronics industry

dc.contributor.authorDe Smedt, F.
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorClaes, Martine
dc.contributor.authorHeyns, Marc
dc.contributor.authorVankerckhoven, H.
dc.contributor.authorVinckier, Chris
dc.date.accessioned2021-10-14T21:23:59Z
dc.date.available2021-10-14T21:23:59Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6213
dc.sourceIIOimport
dc.titleThe increasing importance of the use of ozone in the microelectronics industry
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage379
dc.source.endpage390
dc.source.journalOzone Science and Engineering
dc.source.issue5
dc.source.volume24
imec.availabilityPublished - imec


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