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Techniques to study the reliability of metal RF MEMS capacitive switches

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorvan Spengen, Merlijn
dc.date.accessioned2021-10-14T21:25:50Z
dc.date.available2021-10-14T21:25:50Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6230
dc.sourceIIOimport
dc.titleTechniques to study the reliability of metal RF MEMS capacitive switches
dc.typeJournal article
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1789
dc.source.endpage1794
dc.source.journalMicroelectronics Reliability
dc.source.issue9_11
dc.source.volume42
imec.availabilityPublished - open access
imec.internalnotes13th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis - ESREF; October 2002; Rimini, Italy


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