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On the electrical characterization of high-kappa dielectrics

dc.contributor.authorDegraeve, Robin
dc.contributor.authorCartier, Eduard
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorCarter, Richard
dc.contributor.authorPantisano, Luigi
dc.contributor.authorKerber, Andreas
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-14T21:27:27Z
dc.date.available2021-10-14T21:27:27Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6244
dc.sourceIIOimport
dc.titleOn the electrical characterization of high-kappa dielectrics
dc.typeJournal article
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage222
dc.source.endpage225
dc.source.journalMRS Bulletin
dc.source.issue3
dc.source.volume27
imec.availabilityPublished - open access


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