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CoSi2 formation in the presence of carbon

dc.contributor.authorDetavernier, C.
dc.contributor.authorVan Meirhaeghe, R.L.
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorBrijs, Bert
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:31:03Z
dc.date.available2021-10-14T21:31:03Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6274
dc.sourceIIOimport
dc.titleCoSi2 formation in the presence of carbon
dc.typeJournal article
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.beginpage1207
dc.source.endpage1211
dc.source.journalJournal of Applied Physics
dc.source.issue3
dc.source.volume92
imec.availabilityPublished - imec


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