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Detailed study of scanning capacitance microscopy on cross- sectional and beveled junctions

dc.contributor.authorDuhayon, Natasja
dc.contributor.authorClarysse, Trudo
dc.contributor.authorEyben, Pierre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.date.accessioned2021-10-14T21:33:22Z
dc.date.available2021-10-14T21:33:22Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6292
dc.sourceIIOimport
dc.titleDetailed study of scanning capacitance microscopy on cross- sectional and beveled junctions
dc.typeJournal article
dc.contributor.imecauthorDuhayon, Natasja
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage741
dc.source.endpage746
dc.source.journalJournal of Vacuum Science & Technology B
dc.source.issue2
dc.source.volume20
imec.availabilityPublished - imec


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