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Narrow trench corrosion of copper damascene interconnects

dc.contributor.authorErnur, Didem
dc.contributor.authorKondo, S.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:35:43Z
dc.date.available2021-10-14T21:35:43Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6310
dc.sourceIIOimport
dc.titleNarrow trench corrosion of copper damascene interconnects
dc.typeJournal article
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage7338
dc.source.endpage7344
dc.source.journalJapanese Journal of Applied Physics. Part 1
dc.source.issue12
dc.source.volume41
imec.availabilityPublished - imec


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