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Investigation of barrier and slurry effects on the galvanic corrosion of copper

dc.contributor.authorErnur, Didem
dc.contributor.authorKondo, S.
dc.contributor.authorShamiryan, Denis
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:35:51Z
dc.date.available2021-10-14T21:35:51Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6311
dc.sourceIIOimport
dc.titleInvestigation of barrier and slurry effects on the galvanic corrosion of copper
dc.typeJournal article
dc.contributor.imecauthorErnur, Didem
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage117
dc.source.endpage124
dc.source.journalMicroelectronic Engineering
dc.source.issue1_4
dc.source.volume64
imec.availabilityPublished - imec
imec.internalnotesMAM2002; Vaals, The Netherlands, 3-6 March 2002


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