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Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy

dc.contributor.authorFlannery, C. M.
dc.contributor.authorWittkowski, T.
dc.contributor.authorJung, K.
dc.contributor.authorHillebrands, B.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-14T21:37:36Z
dc.date.available2021-10-14T21:37:36Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6324
dc.sourceIIOimport
dc.titleCritical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage4594
dc.source.endpage4596
dc.source.journalApplied Physics Letters
dc.source.issue24
dc.source.volume80
imec.availabilityPublished - imec


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